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Characterization of excimer laser annealed polycrystalline Si[sub 1âx]Ge[sub x] alloy thin films by x-ray diffraction and spectroscopic ellipsometry

✍ Scribed by Yu, Guolin; Krishna, Kalaga Murali; Shao, Chunlin; Umeno, Masayoshi; Soga, Tetsuo; Watanabe, Junji; Jimbo, Takashi

Book ID: 120663895
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 401 KB
Volume: 83
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.366670

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