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Characterization of an inductively amplified magnetron plasma by glow discharge mass spectrometry

✍ Scribed by C. Molle; A. Beauvois; M. Wautelet; J.P. Dauchot; M. Hecq

Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 102 KB
Volume: 53
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(98)00413-8

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