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Characterization of Aluminum Oxide Films Deposited on Al2O3-TiC by RF Diode Sputtering

✍ Scribed by H. Panitchakan; P. Limsuwan


Book ID
119357491
Publisher
Elsevier
Year
2012
Tongue
English
Weight
482 KB
Volume
32
Category
Article
ISSN
1877-7058

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