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On the off stoichiometry of cerium oxide thin films deposited by RF sputtering

✍ Scribed by C.C. Chin; R.J. Lin; Y.C. Yu; C.W. Wang; E.K. Lin; W.C. Tsai; T.Y. Tseng


Book ID
108025140
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
548 KB
Volume
260
Category
Article
ISSN
0921-4534

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