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Characterization of a 1 kA vacuum arc plasma gun for use as a metal vapour deposition source

✍ Scribed by R.L. Boxman; S. Goldsmith

Book ID: 107930069
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 633 KB
Volume: 43-44
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(90)90041-a

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