✦ LIBER ✦
Organo-metallic chemical vapour deposition of silicon-rich amorphous SixC1−x refractory layers using SiEt4 as a single source
✍ Scribed by F Maury; A Mestari; R Morancho
- Book ID
- 108025318
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 684 KB
- Volume
- 109
- Category
- Article
- ISSN
- 0921-5093
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