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Characterization of 4H-SiC grown on AlN/Si(100) by CVD

✍ Scribed by Z. Qin; P. Han; T.T. Han; B. Yan; N. Jiang; S. Xu; J. Shi; J. Zhu; Z.L. Xie; X.Q. Xiu; S.L. Gu; R. Zhang; Y.D. Zheng

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