Characterization and modeling of on-wafe
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Xiaomeng Shi; Kiat Seng Yeo; Manh Anh Do; Chirn Chye Boon
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Article
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2008
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John Wiley and Sons
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English
β 163 KB
## Abstract Characterization of onβwafer vias using a 0.18βΞΌm RF CMOS technology is presented. Equivalent resistance and inductance of a single via and multiple vias with different physical arrangements are extracted from full wave simulations up to 30 GHz. An equivalent circuit model with frequenc