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Characteristics of ZnO Thin Film Surface Acoustic Wave Devices Fabricated Using Al 2 O 3 Films on Silicon Substrates

โœ Scribed by Shih, Wen-Ching; Wang, Tzyy-Long; Chu, Ming-Hsien

Book ID
111671402
Publisher
Institute of Pure and Applied Physics
Year
2010
Tongue
English
Weight
302 KB
Volume
49
Category
Article
ISSN
0021-4922

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Surface acoustic wave device properties
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โœ Jen-Hao Song; Jow-Lay Huang; Sean Wu; Sheng-Chang Wang; Jian-Long Ruan; Ding-Fwu ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 416 KB

A c-axis orientated aluminium nitride (AlN) film on a 128 โ€ข Y-X lithium niobate (LiNbO 3 ) surface acoustic wave (SAW) device which exhibit a large electromechanical coupling coefficient (k 2 ) and a high SAW velocity property, is needed for future communication applications. In this study, a c-axis