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Characteristics of (Ti,Ta)N thin films prepared by using pulsed high energy density plasma

✍ Scribed by Feng, Wenran; Chen, Guangliang; Li, Li; Lv, Guohua; Zhang, Xianhui; Niu, Erwu; Liu, Chizi; Yang, Si-ze


Book ID
121314050
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
456 KB
Volume
40
Category
Article
ISSN
0022-3727

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