Gas pressure dependence of composition in Ta–Ti–N films prepared by pulsed high energy density plasma

✍ Scribed by Wenran Feng; Hai Zhou; Si-ze Yang

• Book ID: 113783751
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 309 KB
• Volume: 124
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/j.matchemphys.2010.06.033