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Characteristics of semiconductor bridge (SCB) plasma generated in a micro-electro-mechanical system (MEMS)

✍ Scribed by Jong-Uk Kim; Chong-Ook Park; Myung-Il Park; Sun-Hwan Kim; Jung-Bok Lee

Book ID: 108443290
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 184 KB
Volume: 305
Category: Article
ISSN: 0375-9601
DOI: 10.1016/s0375-9601(02)01498-6

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