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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Fabrication of micro-heaters embedded in PDMS using a dry peel-off process

✍ Scribed by Byun, Ikjoo; Ueno, Ryohei; Kim, Beomjoon

Book ID: 121791397
Publisher: IEEE
Year: 2014
Weight: 803 KB
Category: Article
ISBN: 1479935093
DOI: 10.1109/MEMSYS.2014.6765690

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