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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Electromagnetic energy harvester with high efficiency using micro-machining Si springs

✍ Scribed by Shirai, T.; Wakasa, Y.; Nakagawa, T.; Nomura, K.; Yagyu, H.

Book ID: 121791396
Publisher: IEEE
Year: 2014
Weight: 954 KB
Category: Article
ISBN: 1479935093
DOI: 10.1109/MEMSYS.2014.6765655

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