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Characteristics of Plasma-Fluorinated Zinc Oxide Thin-Film Transistors

โœ Scribed by Ye, Z.; Wong, M.


Book ID
119799758
Publisher
IEEE
Year
2012
Tongue
English
Weight
479 KB
Volume
33
Category
Article
ISSN
0741-3106

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## Abstract Stretchable and transparent thin film transistors (TFTs) with intrisically brittle oxide semiconductors are built using a wavy structural configuration that can provide high flexibility and stretchability. After device fabrication procedures including high temperature annealing, the oxi