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Characteristics of Nb/AlOx/Nb junctions fabricated in planarized multi-layer Nb SFQ circuits

โœ Scribed by T. Satoh; K. Hinode; H. Akaike; S. Nagasawa; Y. Kitagawa; M. Hidaka


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
172 KB
Volume
445-448
Category
Article
ISSN
0921-4534

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Planarization of Josephson junctions for
โœ Tetsuro Satoh; K. Hinode; H. Akaike; Y. Kitagawa; S. Nagasawa; M. Hidaka ๐Ÿ“‚ Article ๐Ÿ“… 2004 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 327 KB

Mechanical polishing (MP) is a key technology for fabricating multi-layer, large-scale integrated Nb SFQ circuits. This process, however, could possibly influence junction characteristics. We studied the impact of a planarization process based on MP on the junction characteristics. The process, perf