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Characteristics of MOS diodes fabricated using sputter-deposited W or Cu/W films

โœ Scribed by Spiros Tsevas; Maria Vasilopoulou; Dimitrios N. Kouvatsos; Thanassis Speliotis; Dimitris Niarchos


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
221 KB
Volume
83
Category
Article
ISSN
0167-9317

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Cr-W-N and Cr-Mo-N films were deposited on high speed steel substrate by unbalanced DC reactive magnetron sputtering. Cross-sectional scanning electron microscopy (SEM) morphologies of the films confirmed that the bilayer thickness of multilayer became thinner, and then structural transformation occ