A square indicator using multilayer coplanar waveguide transmission lines on ( ) a GaAs fabricated by using monolithic microwave integrated circuits MMIC technology is presented. The polyimide layer formation, curing and dry etching processes are used in an attempt to obtain high quality dielectric
โฆ LIBER โฆ
Characteristics of Metal-Insulator-Semiconductor Coplanar Waveguides for Monolithic Microwave Circuits
โ Scribed by Sorrentino, R.; Leuzzi, G.; Silbermann, A.
- Book ID
- 114658449
- Publisher
- IEEE
- Year
- 1984
- Tongue
- English
- Weight
- 729 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0018-9480
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