Spectral domain analysis of eigenmodes in a shielded multilayer coplanar waveguide for microwave and millimeter-wave integrated circuits

Design of coplanar waveguide multilayer

Design of coplanar waveguide multilayer square spiral inductors for monolithic microwave integrated circuits

✍ Djuradj Budimir; Ian D. Robertson; Q. H. Wang; A. A. Rezazadeh 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 162 KB 👁 2 views

A square indicator using multilayer coplanar waveguide transmission lines on ( ) a GaAs fabricated by using monolithic microwave integrated circuits MMIC technology is presented. The polyimide layer formation, curing and dry etching processes are used in an attempt to obtain high quality dielectric