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Characteristics of chemical-vapor-deposited copper on the Cu-seeded TiN substrates

โœ Scribed by Seok Kim; Doo-Jin Choi; Kyoung-Ryul Yoon; Ki-Hwan Kim; Seok-Keun Koh

Book ID
108389226
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
773 KB
Volume
311
Category
Article
ISSN
0040-6090

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