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Characteristics of a-SiGe:H Thin Film Transistor Infrared Photosensor for Touch Sensing Displays

โœ Scribed by Sang Youn Han; Kyung Sook Jeon; Byeonghoon Cho; Mi Seon Seo; Junho Song; Hyang-Shik Kong

Book ID
117883765
Publisher
IEEE
Year
2012
Tongue
English
Weight
882 KB
Volume
48
Category
Article
ISSN
0018-9197

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Characteristics of a thin-film LaF3 soli
Characteristics of a thin-film LaF3 solid electrolyte for oxygen sensing
โœ Won-Il Cho; Cheol-Whan Yi; Jeh-Beck Ju; Byung-Won Cho; Kyung-Suk Yun ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 426 KB

A solid electrolyte oxygen sensor has been prepared by the implementation of r.f. magnetron sputtering and electron-beam evaporation methods. Thin films of LaF, are applied as F-ion-conducting solid electrolytes and a sensing electrode made of platinum black or an electron-beam evaporated Pt film is