๐”– Bobbio Scriptorium
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Characteristics of a Photoresist Hologram and Its Replica: Errata

โœ Scribed by Iwata, Fujio ;Tsujiuchi, Jumpei


Book ID
115324126
Publisher
The Optical Society
Year
1974
Tongue
English
Weight
488 KB
Volume
13
Category
Article
ISSN
1559-128X

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The optical proximity effect known as dense/isolated offset is investigated. The magnitude of this effect is found to be dependant upon resist type, film thickness and substrate reflectivity. It is shown that by the application of a bottom anti-reflective coating (ARC) and careful matching of the ph