✦ LIBER ✦
A novel method of optical proximity correction using anti-reflective layers and individual photoresist characteristics
✍ Scribed by G. Arthur; B. Martin
- Book ID
- 104306257
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 281 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
✦ Synopsis
The optical proximity effect known as dense/isolated offset is investigated. The magnitude of this effect is found to be dependant upon resist type, film thickness and substrate reflectivity. It is shown that by the application of a bottom anti-reflective coating (ARC) and careful matching of the photoresist to the application, offset can be substantially eliminated.