Characteristics of a cylindrical magnetron and reactive sputtering of binary compound films

✍ Scribed by A. A. Goncharov; A. V. Demchishin; A. A. Demchishin; E. G. Kostin; V. A. Michenko; B. V. Stetsenko; E. G. Ternovoĭ; A. I. Shchurenko

• Book ID: 111448018
• Publisher: Springer
• Year: 2007
• Tongue: English
• Weight: 261 KB
• Volume: 52
• Category: Article
• ISSN: 1063-7842
• DOI: 10.1134/s106378420708018x