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Characterisation of porous silicon composite material by spectroscopic ellipsometry

✍ Scribed by M. Gaillet; M. Guendouz; M. Ben Salah; B. Le Jeune; G. Le Brun

Book ID
113936773
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
366 KB
Volume
455-456
Category
Article
ISSN
0040-6090

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Spectroscopic ellipsometry characterizat
Spectroscopic ellipsometry characterization of silicon-on-insulator materials
✍ J. Vanhellemont; H.E. Maes πŸ“‚ Article πŸ“… 1990 πŸ› Elsevier Science 🌐 English βš– 570 KB

The wide applicability of spectroscopic ellipsometry (S/z) to characterize non-destructively silicon-on-insulator materials is illustrated with a number of case studies. SE allows the determination of not only the optical properties of single layers as a fimction of the wavelength but also their thi