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Channeling in GaAs. A Monte Carlo Simulation of low Energy Implants

✍ Scribed by Garofalo, F. ;Mazzone, A. M.

Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 211 KB
Volume: 98
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210980223

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