✦ LIBER ✦

Channeling effects in high energy implantation of N+ in silicon

✍ Scribed by A. Gasparotto; A. Carnera; S. Acco; A. La Ferla

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Channeling effects in high energy ion im

✍ M. Berti; G. Brusatin; A. Carnera; A. Gasparotto; R. Fabbri 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 270 KB

Big channeling effects at low-energy ion

✍ Bollmann, J. ;Klose, H. ;Mertens, A. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 199 KB

Monte Carlo simulation of channeling eff

✍ Kenjiro Oura; Tsuneki Kojima; Fumiya Shoji; Teruo Hanawa 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 351 KB

High energy P implants in silicon

✍ V. Raineri; A. Cacciato; F. Benyaïch; F. Priolo; E. Rimini; G. Galvagno; S. Capi 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 878 KB

Channeling implantation of B and P in si

✍ R.J. Schreutelkamp; V. Raineri; F.W. Sans; R.E. Kaim; J.F.M. Westendorp; P.F.H.M 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 440 KB

High-energy ion implantation of iron in

✍ K.G. Bhole; B.A. Kamalapurkar; S.K. Dubey; A.D. Yadav; T.K. Gundu Rao; Tanuja Mo 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 333 KB