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Channeling and steering effects on 2 MeV He2+ ions in Ge+ ion implanted SiGe-alloy layers

✍ Scribed by P. Songsiriritthigul; G. Holmén


Book ID
113287515
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
369 KB
Volume
115
Category
Article
ISSN
0168-583X

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