𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Centimeter scale atomic force microscope imaging and lithography

✍ Scribed by Minne, S. C.; Adams, J. D.; Yaralioglu, G.; Manalis, S. R.; Atalar, A.; Quate, C. F.

Book ID
115514787
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
691 KB
Volume
73
Category
Article
ISSN
0003-6951

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Manipulation, dissection, and lithograph
Manipulation, dissection, and lithography using modified tapping mode atomic force microscope
✍ Zhiguo Liu; Zhuang Li; Gang Wei; Yonghai Song; Li Wang; Lanlan Sun πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 311 KB

## Abstract A modified tapping mode of the atomic force microscope (AFM) was introduced for manipulation, dissection, and lithography. By sufficiently decreasing the amplitude of AFM tip in the normal tapping mode and adjusting the setpoint, the tip‐sample interaction can be efficiently controlled.

Nano-lithography by electron exposure us
Nano-lithography by electron exposure using an Atomic Force Microscope
✍ P Davidsson; A Lindell; T MΓ€kelΓ€; M Paalanen; J Pekola πŸ“‚ Article πŸ“… 1999 πŸ› Elsevier Science 🌐 English βš– 423 KB

We have used a conductive Atomic Force Microscope (AFM) tip to expose a very thin resist film. An exposing current of low energy electrons was induced from the tip to the substrate by applying a small bias voltage. Uniform resist films as thin as 10 nm were fabricated using the Langmuir-Blodgett tec