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Cavities in helium implanted and annealed silicon characterized by spectroscopic ellipsometry

✍ Scribed by Fukarek, W.; Kaschny, J. R.

Book ID: 120205081
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 544 KB
Volume: 86
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.371341

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