Electroluminescence in plasma ion implan
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Desautels, Phillip R. ;Bradley, Michael P. ;Steenkamp, J. T. ;Mantyka, James
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Article
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2009
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John Wiley and Sons
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English
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## Abstract Electroluminescent silicon is very desirable for its potential applications in computing and telecommunications. Plasma Ion Implantation (PII) is a means to modify the surface and subโsurface properties of silicon to produce luminescent centres. Silicon to be treated with PII is immerse