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Cathodic Deposition of Amorphous Silicon from Tetraethylorthosilicate in Organic Solvents

✍ Scribed by Takeda, Yasuo


Book ID
121854980
Publisher
The Electrochemical Society
Year
1981
Tongue
English
Weight
438 KB
Volume
128
Category
Article
ISSN
0013-4651

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Cathodic deposition of amorphous silicon
✍ T.R. Rama Mohan; F.A. KrΓΆger πŸ“‚ Article πŸ“… 1982 πŸ› Elsevier Science 🌐 English βš– 588 KB

A-t----Amorphous silicon containing cubon, hydrogen and fiuorine were ekctrodeposited from solutions contaittmg cthyicrrc glycol, hydrofluoric acid, and tetraethyl orthosilicate or sihcie seid. The deposits were charscterizcd by electrical titance and ir reflectance nKaauremcnts. The deposits exhibi