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Cathodic arc deposition of copper oxide thin films

✍ Scribed by R.A. MacGill; S. Anders; A. Anders; R.A. Castro; M.R. Dickinson; K.M. Yu; I.G. Brown


Book ID
107930425
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
545 KB
Volume
78
Category
Article
ISSN
0257-8972

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Cathodic arc plasma deposition of nano-m
✍ Sun Kyu Kim; Vinh Van Le; R.L. Boxman; V.N. Zhitomirsky; Jeong Yong Lee πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 527 KB

Thin films of Zr-O/Al-O were deposited on SKD 11 tool steel substrate using Zr and Al cathodes in a cathodic arc plasma deposition system. The substrates were mounted on a rotating holder which alternatively exposed them to plasma from the two cathodes. The influence of the Zr and Al cathode arc cur