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Carbon nitride thin films prepared by a capacitively coupled RF plasma jet

✍ Scribed by G. Dinescu; E. Aldea; P. Boieriu; G. Musa; A. Andrei; M. Dinescu; G.J.H. Brussaard; R.J. Severens; M.C.M. van de Sanden; D.C. Schram

Book ID: 114168443
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 440 KB
Volume: 120
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00531-9

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