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Carbon doping in GaAs using trimethylarsine by metalorganic chemical vapor deposition with high-speed rotating susceptor

โœ Scribed by Noriyuki Watanabe; Hiroshi Ito; Tadao Ishibashi


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
561 KB
Volume
147
Category
Article
ISSN
0022-0248

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