Selective InGaAs growth at low temperature by metalorganic chemical vapor deposition (MOCVD) with high-speed rotating susceptor

✍ Scribed by Minoru Ida; Kenji Kurishima; Takashi Kobayashi

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 525 KB
• Volume: 129
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(93)90513-v