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Carbon-based composite thin films for use as microelectrode

✍ Scribed by H.L. Lee; Jyh-Ming Ting


Book ID
114193718
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
233 KB
Volume
82
Category
Article
ISSN
0254-0584

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## Abstract Selected properties of indium‐tin‐oxide (ITO) films prepared by r.f. diode sputtering have been investigated in consideration of surface morphology, optical properties, crystal structure and phase formation, electrical resistivity and chemical resistance. The ITO films showed low electr