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Thin polymeric films for use as dielectrics

✍ Scribed by Turner, L.W.


Book ID
118684612
Publisher
Institution of Electrical Engineers
Year
1961
Weight
826 KB
Volume
21
Category
Article
ISSN
2054-054X

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Plasma-polymerized multistacked bipolar
✍ Woo-Jun Yoon; Dhiman Bhattacharyya; Richard B. Timmons; Paul R. Berger πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 588 KB

A 10-layer stack of bipolar gate dielectric was formed by sequential layer-by-layer deposition using pulsed radio frequency (RF) plasma polymerization of allylamine and vinyl acetic acid monomers. Due to polar groups localized at the interfaces between each consecutive layer by alternating amine (-N