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Capacitive humidity-sensitivity of carbonized silicon nanoporous pillar array

โœ Scribed by Hai Yan Wang; Xin Jian Li

Book ID
113793527
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
411 KB
Volume
64
Category
Article
ISSN
0167-577X

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Effect of electrode configuration on cap
Effect of electrode configuration on capacitive humidity sensitivity of silicon nanoporous pillar array
โœ Long Yu Li; Wei Fen Jiang; Shun Hua Xiao; Yong Fen Dong; Hui Fang Ji; Xin Jian L ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 463 KB

Through evaporating two-side comb electrodes and coplanar interdigital electrodes, two humidity sensors were fabricated based on silicon nanoporous pillar array (Si-NPA) and the corresponding device sensitivities were studied. The experimental results showed that the sensor with coplanar interdigita