Capacitive humidity-sensing properties of electron-beam-evaporated nanophased WO3 film on silicon nanoporous pillar array

✍ Scribed by Yong Fen Dong; Long Yu Li; Wei Fen Jiang; Hai Yan Wang; Xin Jian Li

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 344 KB
• Volume: 41
• Category: Article
• ISSN: 1386-9477
• DOI: 10.1016/j.physe.2008.11.014