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Capacitive humidity sensing properties of hydrothermally-etched silicon nano-porous pillar array

โœ Scribed by Yuan Yuan Xu; Xin Jian Li; Jin Tian He; Xing Hu; Hai Yan Wang


Book ID
108263249
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
144 KB
Volume
105
Category
Article
ISSN
0925-4005

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