## Special Issue on RF Applications of MEMS and Micromachining Micromachining is a new paradigm in IC fabrication that has spawned many new developments in a variety of electronic fields. Bulk and surface micromachining techniques are used to create miniature mechanical ลฝ . structures on an integra
โฆ LIBER โฆ
Call for Papers: Special issue on optimization techniques, algorithms, and applications
โ Scribed by Weile, Daniel (editor)
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 34 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0894-3370
- DOI
- 10.1002/jnm.837
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Micromachining is a new paradigm in IC fabrication that has spawned many new developments in a variety of electronic fields. Bulk and surface micromachining techniques are used to create miniature mechanical structures on an integrated circuit called MEMS (microelectromechanical systems). Micromachi
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