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Calibration test systems for thermal imagers

✍ Scribed by Sira Test & Certification Ltd


Book ID
113408117
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
465 KB
Volume
27
Category
Article
ISSN
0963-8695

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Calibrated deflection system for electro
✍ M. BrisegΓ₯rd; M. Lidell; S. Steier; G. Stille πŸ“‚ Article πŸ“… 1987 πŸ› Elsevier Science 🌐 English βš– 285 KB

A method for fast access of an electron beam probe to integrated circuit nodes is presented. Application of the method results in increased capacity for Electron Beam Testers (EBT). The method utilizes a calibrated postlens magnetic deflection unit. This unit can move the electron beam to any locati