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A test system for calibrating flickermeters

✍ Scribed by Arseneau, R.; Sutherland, M.E.; Zelle, J.J.


Book ID
114629083
Publisher
IEEE
Year
2002
Tongue
English
Weight
296 KB
Volume
51
Category
Article
ISSN
0018-9456

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A method for fast access of an electron beam probe to integrated circuit nodes is presented. Application of the method results in increased capacity for Electron Beam Testers (EBT). The method utilizes a calibrated postlens magnetic deflection unit. This unit can move the electron beam to any locati