Calibrated deflection system for electron beam testing

✍ Scribed by M. Brisegård; M. Lidell; S. Steier; G. Stille

• Book ID: 104306165
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 285 KB
• Volume: 7
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(87)80018-7

✦ Synopsis

A method for fast access of an electron beam probe to integrated circuit nodes is presented. Application of the method results in increased capacity for Electron Beam Testers (EBT). The method utilizes a calibrated postlens magnetic deflection unit. This unit can move the electron beam to any location within an area of 6 by 6 mm within 200 microseconds. The precision of the system allows the beam to be positioned well within 4 micron metallic conductors.