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Calculation of the Stoichiometric Composition of Nanostructures Synthesized by Molecular Layer Deposition on the Surface of Solid Matrices

✍ Scribed by E. A. Sosnov; A. A. Malkov; A. A. Malygin

Book ID
106518807
Publisher
SP MAIK Nauka/Interperiodica
Year
2005
Tongue
English
Weight
83 KB
Volume
78
Category
Article
ISSN
1070-4272

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A method for calculating the dependence of equivalent layer thickness on bulk phase composition in athermal binary mixtures has been devised. The prerequisite to the procedure is knowledge of the adsorption excess isotherm and of the cross-sectional area of one component. After integration of the ex