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Calculation of the backscattered ion energy and angular distributions during the grazing implantation

✍ Scribed by IE Mozolevsky

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 549 KB
Volume: 46
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(95)80075-1

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