✦ LIBER ✦

Energy and angular distributions of ions backscattered from the sidewalls during the implantation into deep trenches

✍ Scribed by M Posselt; G Otto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Calculation of the backscattered ion ene

✍ IE Mozolevsky 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 549 KB

An investigation into the reactivity of

✍ C.J. Proctor; A.G. Brenton; J.H. Beynon; B. Kralj; J. Marsel 📂 Article 📅 1980 🏛 Elsevier Science ⚖ 785 KB