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C–AFM and X–TEM : Studies of Mixed-Phase Silicon Thin Films

✍ Scribed by Tomáš Mates; Antonín Fejfar; Bohuslav Rezek; Jan Kočka; Paula C. P. Bronsveld; Jatin K. Rath; Ruud E. I. Schropp

Publisher
Wiley (John Wiley & Sons)
Year
2008
Weight
570 KB
Volume
10
Category
Article
ISSN
1439-4243

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✦ Synopsis

Thin intrinsic silicon films containing microcrystalline grains embedded in amorphous tissue were studied by two complementary microscopy techniques. The conductive atomic force microscopy was performed in standard ambient conditions with very sensitive (pA) current detection. The cross-sectional transmission electron microscopy images of the amorphous phase revealed the columnar structure, which was attributed to the bumpy structures on the surface.

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✍ Fejfar, A. ;Vetushka, A. ;Kalusová, V. ;Čertík, O. ;Ledinský, M. ;Rezek, B. ;St 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 692 KB

## Abstract Scanning probe methods (SPMs) such as conductive atomic force microscopy (C‐AFM) can be used to probe the structure and local conductivity of the mixed phase silicon thin films with nanometer resolution. Effective medium approximations (EMAs) were used to relate the nanoscale properties