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C60 ion sputtering of layered organic materials

✍ Scribed by Alexander G. Shard; Felicia M. Green; Ian S. Gilmore

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
527 KB
Volume
255
Category
Article
ISSN
0169-4332

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Depth profile of C 60 ion-used X-ray photoelectron spectroscopy (XPS) was studied on fluorinated organic layers with different thicknesses. We found that the depth resolution decreased, the sputtering rate went down and the surface turned rough as the layer thickness increased. This is because carbo